Application Case Studies

Thermocouple Assembly for Semiconductor Wafter Manufacture Takes the Heat : Thermocouple Assembly for 1600°C Highly Corrosive Wafer Assembly

Industry: Semiconductor
Application: Monitoring radiation temperatures up to 1600° C in a highly corrosive environment.

Customer Requirement: The customer needed a very reliable extended life thermocouple assembly to provide uniform temperature measurement within a reactor. The sensor was to replace a previous supplier's product that exhibited poor quality and performance.

Conax Semiconductor Solution:
Conax provided a Type R ungrounded thermocouple with a 0.187" – diameter molybdenum sheath and a 6" T3 leadwire termination with a male plug. Probe lengths of 8", 12", and 16" were provided. Conax's product performance far exceeded the expectations of the customer. To date, more that 4000 thermocouples have been supplied over the last four years.