Application Case Studies

Conax Semiconductor Design Reduces Cost for End User

Industry: Semiconductor
Application: Process control of an epitaxial reactor.

Customer Requirement:
This design was created for an end user of an ASM Epsilon E2000 reactor. In this case, we were asked to provide a comparable design at a lower price than the OEM supplier.

Conax Semiconductor Solution:
Four Type R thermocouples are used to monitor the process in the center and at three places around a graphite susceptor used to process a 200mm wafer. The assemblies use quartz sheaths because no metal could be introduced into the process without contaminating the process. Temperatures reach 1200º C.
Typical life for these sensors is one month per set. The high replacement cost was what led the customer to seek a lower cost solution, which Conax Semiconductor was able to supply.